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入口光斑Input Beam Aperture (mm)

10

14

20

30

光柱位移Beam Displacement (mm)

12.54

16.42

25.25

35.53

跟隨誤差Tracking Error (ms)

0.3

0.40

0.65

1.2

重複精度Repeatability (µrad)

＜1

＜1

＜1

＜1

零位漂移Offset Drift (µrad/K)

＜15

＜15

＜15

＜15

增益漂移Gain Drift (ppm/K)

＜8

＜8

＜8

＜8

8小時以上漂移Long-term drift over 8 hours (mrad)

＜0.1

＜0.1

＜0.1

＜0.1

1%全行程1% of full scale (ms)

0.55

0.85

1

1.50

10%全行程10% of full scale (ms)

1.4

1.80

3

5

定位速度Positioning Speed (m/s)

7

5

3

2

掃描角度Typical Scan Angle (°)

±12.5

±12.5

±12.5

±12.5

增益誤差Gain Error (mrad)

<5

<5

<5

<5

零位誤差Zero Offset (mrad)

<5

<5

<5

<5

非線性度Nonlinearity (%)

<0.1

<0.1

<0.1

<0.1

電源要求 Power Requirements

±15VDC, ≥3A

±15VDC, ≥3A

±15VDC, ≥3A

±15VDC, ≥3A

數字接口 Digital Interface

XY2-100

XY2-100

XY2-100

XY2-100

工作溫度Operation Temperature (℃)

25±10

25±10

25±10

25±10

重量Weight (kg)

1.9

2.3

5.0

5.2

入口光斑Input Beam Aperture (mm)

10

14

20

30

光柱位移Beam Displacement (mm)

12.54

16.42

25.25

35.53

跟隨誤差Tracking Error (ms)

0.2

0.25

0.5

0.80

重複精度Repeatability (µrad)

＜1

＜1

＜1

＜1

零位漂移Offset Drift (µrad/K)

＜15

＜15

＜15

＜15

增益漂移Gain Drift (ppm/K)

＜8

＜8

＜8

＜8

8小時以上漂移Long-term drift over 8 hours (mrad)

＜0.08

＜0.08

＜0.08

＜0.08

1%全行程1% of full scale (ms)

0.45

0.6

0.85

1.30

10%全行程10% of full scale (ms)

1.30

1.50

2.60

4.80

定位速度Positioning Speed (m/s)

10.0

7.0

5.0

3.0

掃描角度Typical Scan Angle (°)

±12.5

±12.5

±12.5

±12.5

增益誤差Gain Error (mrad)

<5

<5

<5

<5

零位誤差Zero Offset (mrad)

<5

<5

<5

<5

非線性度Nonlinearity (%)

<0.1

<0.1

<0.1

<0.1

電源要求 Power Requirements

±15VDC, ≥3A

±15VDC, ≥3A

±15VDC, ≥3A

±15VDC, ≥3A

數字接口 Digital Interface

XY2-100

XY2-100

XY2-100

XY2-100

工作溫度Operation Temperature (℃)

25±10

25±10

25±10

25±10

重量Weight (kg)

1.9

2.3

5.0

5.2